About: http://webisa.webdatacommons.org/78834527

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a graph showing the etching speed of an aluminum film by the plasma generating gas used in the present invention in comparison with that by conventional carbon tetrachloride;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au