About: http://webisa.webdatacommons.org/78865392

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS is a new technology leveraging the enormous capital investment in the IC fabrication technology.
http://www.w3.org/ns/prov#wasQuotedFrom	ntu.edu.sg