About: http://webisa.webdatacommons.org/79043166

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3b is a cross-sectional view, perpendicular to the cross section shown in FIG. 3a, through the substrate after the process steps shown in FIG. 3a are performed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com