About: http://webisa.webdatacommons.org/79248776

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, the silicon diffusion preventing conductive layer 4 can be made of metal including at least one of Ti, W, Ta, Mo, Co and Ni, or their nitride, or their films including nitrogen, or their silicide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr