About: http://webisa.webdatacommons.org/79493612

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 1, the metal conductive material, e.g. the number of vias 101-1, 101-2, 101-3, . . . , 101-N and the number of metal lines 107-1, 107-2, 107-3, . . . , 107-N, fills the holes and the trenches.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com