About: http://webisa.webdatacommons.org/79514964

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As can be seen in FIG. 10, the structure is similar to that of FIG. 9, except that the starting substrate is an SOI substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com