| http://www.w3.org/ns/prov#value | - CMP-stop layer 16 is a thin (about 20 to about 100 nm thick) layer of a dielectric silicon-based compound of low dielectric constant such as silicon nitride or silicon carbide, or a silicon-containing material of lower dielectric constant such as hydrogenated silicon carbide, silicon oxynitride, or a non-silicon-containing polymer such as one derived from benzocyclobutene.
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