| http://www.w3.org/ns/prov#value | - (14) A wafer holder to hold a wafer on the upper surface characterized in that: said wafer holder comprises a wafer support plate and n or more pieces of wafer support members placed on the wafer support plate; and at least n???2 pieces of said wafer support members are the wafer support members according to any one of the items (9) to (13) wherein n is an integer not smaller than 4.
|
