| http://www.w3.org/ns/prov#value | - A working medium such as an inert gas, e.g., argon, is injected under a pressure of about 1 mTorr via passage 222 into the interior of lower part 201 of housing 200, whereby the working gas flows into the interior of upper part 203 via a passage 222 and then via ion-emitting slit 214 and slit 218 in sputterable target 216 into the working chamber inside upper part 203 of the housing.
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