About: http://webisa.webdatacommons.org/7973406

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	SEMATECH has investigated:??? the impact of manufacturable ex situ and in situ high-k/higher-k dielectrics;??? conventional process routes and materials such as HfO2, ZrO2, Al2O3 by manufacturable atomic-layer-depositio
http://www.w3.org/ns/prov#wasQuotedFrom	electroiq.com