About: http://webisa.webdatacommons.org/8016004

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The array includes numerous detector elements 34 which may be formed of aluminum, or other conductive material, or by reactive ion etching of a more refractory material such as tungsten which is resistant to sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com