About: http://webisa.webdatacommons.org/80306173

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	forming a buffer layer beneath the active layer using an inorganic insulating material including silicon oxide (SiO2) or silicon nitride (SiNX).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com