About: http://webisa.webdatacommons.org/80389626

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	forming a number of access transistors, at least one access transistor including a gate coupled to a dielectric film on a body region between a source region and a drain region, the dielectric film formed by a method including:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com