About: http://webisa.webdatacommons.org/80489581

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Etching is a process known in the art and is typically performed using compounds such as CHF3, CF4, C2 F6 and combinations thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com