About: http://webisa.webdatacommons.org/80560329

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It has been discovered that the interference between the operation of the two N2/IPA dispensing nozzles 5 a, 5 b is a result of their side-by-side positioning relative to the path of motion across the substrate 50.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au