| http://www.w3.org/ns/prov#value | - the movable part moves with respect to the stationary part, the second electrode moves with respect to the first electrode without substantially changing an overlap area between said electrodes; the MEMS device is formed in a single wafer; and the movable part has a reflective surface and the MEMS device is an element of an optical cross-connect having two or more MEMS device.
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