About: http://webisa.webdatacommons.org/81068657

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, with this microstructure technique, there is a drawback in that disposing the microstructures on the substrate with certainty and carrying out accurate alignment are difficult.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com