About: http://webisa.webdatacommons.org/81101952

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, metal such as Ta, Ti, Al or Cr is deposited either as a single layer or a multi-layers on the transmissive insulating substrate, and then the layer or layers are patterned.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com