About: http://webisa.webdatacommons.org/81129643

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To achieve acceptable semiconductor device yields per wafer and acceptable device performance, the silicon surface must be free of contaminants and impurities such as oxygen and carbon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com