About: http://webisa.webdatacommons.org/8124070

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The average hole diameter was about 1 mil and it was found that adjacent holes could be spaced as closely as 2 mils, hole center-line to hole center-line, without causing cracking, spalling or other damage to the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com