About: http://webisa.webdatacommons.org/81532675

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, as described above, in general, optical devices employed along with an excimer laser such as a KrF laser, an ArF laser, or the like, serving as a light source, is formed of quartz or fluorite.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com