About: http://webisa.webdatacommons.org/81623885

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the characteristic analysis, for example it analyzes whether or not a dimension of the second scan area is a dimensions that has a tolerance level compliant to a CD standard dimension.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com