| http://www.w3.org/ns/prov#value | - In one possible embodiment, plastics, epoxies, glass, silicon, polysilicon, silicon nitride, silicon oxide, oxynitride, plastics or metals such as electroplated copper or aluminum, or any other available material suitable for lithographic processing may be used to define the necessary microactuator, valve, valve housing, valve structures, or conduits.
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