About: http://webisa.webdatacommons.org/81732848

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a step of FIG. 23E, after an ion implantation mask etc. are formed if necessary, the regions other than the regions where base layers 203 will be formed are covered with a second mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr