| http://www.w3.org/ns/prov#value | - In order to prevent an occurrence of such a defect as described above, a method has been taken that a film having a compressive stress generated within the film or a film having a tensile stress generated within the film is laminated to reduce the total stress, for example, as described in the Japanese Patent Unexamined Publication No. JP-A-63-260052.
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