About: http://webisa.webdatacommons.org/81769401

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIG. 13D, a fourth insulating layer 188 is formed by depositing inorganic insulating material such as silicon oxide (SiO2) or silicon nitride (SiNX), for example, on the substrate 160.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com