About: http://webisa.webdatacommons.org/81827927

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the ion implantation process described above, dopants other than Si, particularly the n-type dopants such as As or P, are effective for enhancing the production of the SiClx molecules.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com