About: http://webisa.webdatacommons.org/81844965

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another advantage of the present invention is a method of manufacturing a semiconductor device comprising a Cu or Cu alloy interconnect member having improved electromigration resistance.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es