About: http://webisa.webdatacommons.org/81896433

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the surface of the active region on both sides of gate electrode 104, source/drain regions 103 which are diffused layers doped with impurity such as arsenic or phosphorous, are formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com