About: http://webisa.webdatacommons.org/82292711

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the etch process to remove the buffer insulating layer 140 may comprise a wet etch or other etch process that does not contain plasma.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com