About: http://webisa.webdatacommons.org/82566226

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For certain processes, molybdenum may be deposited by physical vapor deposition, for example by sputtering, evaporation, and ion plasma deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com