About: http://webisa.webdatacommons.org/82793673

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A lower interlayer dielectric 130 is stacked on a substrate including the active region and the field
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com