About: http://webisa.webdatacommons.org/82820406

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Illustrative examples of such barrier materials include a refractory metal, such as Ta, Ti, W, Ru, or nitrides thereof, e.g., TaN, TiN, WN. The first liner 140 may also comprise TiNSi.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es