About: http://webisa.webdatacommons.org/83067128

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Surfaces that can be polished according to the present invention include silicon dioxide, aluminum, copper, tungsten and refractory metals such as niobium, tantalum and titanium and their nitrides.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au