About: http://webisa.webdatacommons.org/83103037

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently, the gas feed mechanism 51 and the gas discharge mechanism 52 of the gas unit are operated so that the interior of the clean box is displaced by the non-oxidizing gas such as nitrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com