About: http://webisa.webdatacommons.org/83126327

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such a mask blank may also be a mask blank including a resist film or a mask blank before a resist film is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com