About: http://webisa.webdatacommons.org/83150873

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, provided is an exposure apparatus capable of performing exposure with high energy utilization efficiency.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com