About: http://webisa.webdatacommons.org/83220415

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Turning to FIG. 5 c, next a layer 120 of a silicide-forming metal, for example titanium, cobalt, chromium, tantalum, platinum, niobium, or palladium, is deposited.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com