About: http://webisa.webdatacommons.org/83310528

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, various aspects of the present invention are described with reference to a layer or structure being formed on a substrate or other layer or structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es