About: http://webisa.webdatacommons.org/8345936

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 13, wherein SiNx is deposited on a second region on the substrate, the second region not including the first region.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com