About: http://webisa.webdatacommons.org/83559914

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As examples of the substrate W to be processed in the process-gas supply apparatus 2 of the embodiment, a glass substrate and an LCD substrate other than the semiconductor wafer may be mentioned.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au