About: http://webisa.webdatacommons.org/83633354

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As an alternative, a combination of two different types of radiation as above discussed could be used for the imagewise exposure, for example a combination of conventional lithography and lasers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com