| http://www.w3.org/ns/prov#value | - friction-based controlUS6893332Aug 30, 2004May 17, 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6932687Feb 5, 2004Aug 23, 2005Micron Technology, Inc.Planarizing pads for planarization of microelectronic substratesUS6939211Oct 9, 2003Sep 6, 2005Micron Technology, Inc.Planarizing solutions in
|
