| http://www.w3.org/ns/prov#value | - A first interlayer insulating film 16 a includes an inorganic material such as silicon oxide or silicon nitride, a first interlayer insulating film 16 b includes a substance having self-planarization such as acrylic, siloxane (a substance which has a skeleton formed by the bond of silicon (Si) and oxygen (O), and which includes at least hydrogen as a substituent), or silicon oxide which can be for
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