About: http://webisa.webdatacommons.org/8390563

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The showerhead electrode 20 is preferably of silicon but can be of any other suitable electrically conductive material such as aluminum, graphite, silicon carbide, etc. and gas passes through a plurality of openings 26.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com