| http://www.w3.org/ns/prov#value | - f a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatusUS779172716 Aug 20047 Sep 2010Asml Netherlands B.V.Method and apparatus for angular-resolved spectroscopic lithography characterizationUS779173215 Aug 20057 Sep 2010Asml Netherlands B.V.Method and apparatus for angular-resolved spectrosco
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