| http://www.w3.org/ns/prov#value | - If the temperature is lower than the value, there is a fear that a sufficient gettering effect is not obtained since the gate insulating film 210 becomes a blocking layer. [0073] Thus, this heat treatment is carried out at a temperature exceeding 700??? C., preferably 800 to 1000??? C. (typically 950??? C.), and when a processing time is 0.1 to 6 hours, typically 0.5 to 1 hour, the sufficient gett
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