About: http://webisa.webdatacommons.org/8409808

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Through the use of the inventive process non-single crystal silicon regions having lateral dimensions of up to 2 mm???1 mm are converted into single crystal regions overlying a dielectric material such as silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com