| http://www.w3.org/ns/prov#value | - A first exposure apparatus according to the present invention is an exposure apparatus which exposes a second object (W1) by an exposure beam via a first object (R1) and a projection system (PL), and which comprises an illumination system (IL1, IL2) which has a main body frame (90A) and a partial illumination system (IL2) that is slidable with respect to the main body frame, and illuminates the fi
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