| http://www.w3.org/ns/prov#value | - If the first piezoelectric film 136 and the second piezoelectric film 138 are made of PZT, for example, the firing temperature can exceed 700?? C. Accordingly, the second insulating layer 150 is preferably made of a material that does not exhibit physical damage such as cracks or fractures when heated to the firing temperature of the first piezoelectric film 136 and/or the second piezoelectric fil
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